Product Overview
Working Principle of Flatness Measurement: The measured workpiece (placed on the worktable) is aligned with the surface to be measured by a vision lens equipped with a camera to obtain coordinate values of each point. The spectral confocal line laser scans and stitches the surface of the measured part. Geometric measurement software is used to fit and calculate the height data of the part, outputting data such as flatness, planarity, warpage, height difference, and V-card depth. Meanwhile, it can measure various geometric dimensions and geometric tolerances of the 2D planar surface.
Product Advantages
1. Adopts gantry structure with Grade "00" granite base, columns and worktable, ensuring the datum surface remains undeformed during long-term use and the mechanical system has extremely high stability.
2. Uses imported Japanese guide rails and ground ball screws to minimize mechanical errors of the instrument and ensure the overall measurement accuracy.
3. Equipped with high-strength vacuum adsorption platform and Panasonic three-axis servo motors.
4. High-precision line scan laser:
Reference Distance (CD)① |
60mm |
|
Z-axis Height (FS) |
8.5mm |
|
X-axis Width |
Near End |
16mm |
Reference Distance |
17mm |
|
Far End |
17.6mm |
|
Z-axis Repeatability② |
0.15μm |
|
X-axis Repeatability |
1.5μm |
|
X-axis Data Interval |
5.5μm |
|
Z-axis Linearity |
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X-axis Profile Points |
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Reflection Angle (°) |
35 |
|
Scan Speed (Hz) |
3200-67000 |
|
Overall Machine Parameters
Model |
YVM-322CNCJ |
YVM-432CNCJ |
YVM-542CNCJ |
Measuring Stroke (mm) |
300x200x200 |
400x300x200 |
500x400x200 |
Overall Dimension (mm) |
760x650x1100 |
860x750x1100 |
960x850x1100 |
Glass Load Capacity (kg) |
40 |
40 |
40 |
Machine Weight (kg) |
280 |
320 |
380 |
Measurement Accuracy |
X,Y:(2.5+L/200)μm Z:≤5μm (Laser Measuring Range) |
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Repeatability |
2μm |
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Linear Scale Resolution |
0.5μm |
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Magnification |
Imaging Magnification: 20~200X |
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Light Source |
Surface Light: 5-ring 8-zone LED cold light source with 256-level adjustable brightness |
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Vacuum Adsorption |
High-precision vacuum adsorption platform |
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Operation Mode |
Mouse + Joystick Control |
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Power Supply |
220V (AC) 50Hz |
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Application Fields
Ink to Solder Mask Base Surface Height and Flatness
FPC Flatness
Inductors
Capacitors
Diodes
Optical Components
Aerospace Components
Gold Fingers
Automotive Components