Flatness Tester
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详情介绍

Product Overview

Working Principle of Flatness Measurement: The measured workpiece (placed on the worktable) is aligned with the surface to be measured by a vision lens equipped with a camera to obtain coordinate values of each point. The spectral confocal line laser scans and stitches the surface of the measured part. Geometric measurement software is used to fit and calculate the height data of the part, outputting data such as flatness, planarity, warpage, height difference, and V-card depth. Meanwhile, it can measure various geometric dimensions and geometric tolerances of the 2D planar surface.

Product Advantages

1. Adopts gantry structure with Grade "00" granite base, columns and worktable, ensuring the datum surface remains undeformed during long-term use and the mechanical system has extremely high stability.
2. Uses imported Japanese guide rails and ground ball screws to minimize mechanical errors of the instrument and ensure the overall measurement accuracy.
3. Equipped with high-strength vacuum adsorption platform and Panasonic three-axis servo motors.
4. High-precision line scan laser:

Reference Distance (CD)①

60mm

Z-axis Height (FS)

8.5mm

 

X-axis Width

Near End

16mm

Reference Distance

17mm

Far End

17.6mm

 

Z-axis Repeatability②

0.15μm

X-axis Repeatability

1.5μm

X-axis Data Interval

5.5μm

Z-axis Linearity

X-axis Profile Points

      Reflection Angle (°)

35

Scan Speed (Hz)

     3200-67000

Overall Machine Parameters

Model

YVM-322CNCJ

YVM-432CNCJ

YVM-542CNCJ

Measuring Stroke (mm)

300x200x200

400x300x200

500x400x200

Overall Dimension (mm)

760x650x1100

860x750x1100

960x850x1100

Glass Load Capacity (kg)

40

40

40

Machine Weight (kg)

280

320

380

Measurement Accuracy

X,Y:(2.5+L/200)μm   Z:≤5μm (Laser Measuring Range)

Repeatability

2μm

Linear Scale Resolution

0.5μm

Magnification

Imaging Magnification: 20~200X

Light Source

Surface Light: 5-ring 8-zone LED cold light source with 256-level adjustable brightness

Vacuum Adsorption

High-precision vacuum adsorption platform

Operation Mode

Mouse + Joystick Control

Power Supply

220V (AC)  50Hz

Application Fields

Ink to Solder Mask Base Surface Height and Flatness FPC Flatness Inductors Capacitors Diodes Optical Components Aerospace Components Gold Fingers Automotive Components
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